SmarPods

SmarPods are parallel kinematics for precise applications.

Key features

  • Six degrees of freedom
  • Virtual pivot defined via software
  • Compact design
  • Large travel ranges
  • High resolution
  • Customisable
  • High repeatability
  • High stiffness
  • Many options available:
  • HV & UHV compatibility
  • Non-magnetic materials
  • UV-resilient materials

 

 

SmarPod Microassembling Demo

 

 

Repeatability with Full Travel Range

  • Repeatability (X, Y, Z)             200 nm
  • Repeatability (ΘX, ΘY, ΘZ)       10 µrad (30 µrad for the SmarPod 70.42)

The repeatability is even better for smaller movements as shown in the graphs below.

 

Repeatability for Shorter Travel

Linear Repeatability

  • Interferometer test
  • 10 steps - back and forth
  • Step width: 10 nm
  • One step every 200 ms
  • Graph shows an excellent linear repeatability

Angular Repeatability

  • Interferometer test
  • 10 steps - back and forth
  • Step width: 1 µrad
  • One step every 500 ms
  • Graph shows an excellent 
  • angular repeatability

 

 

Customization

 

Please do not hesitate to ask for customization so that it fits to your demands as good as possible.

 

Following three customized SmarPods 110.45 are shown:

SmarPod 110.45 with a customized base plate and a customized top plate with an opening

 

 

               Non magnetic SmarPod 110.45 based on ceramic guide ways

 

             Black version of a SmarPod 110.45 for an optical application