SmarPod 110.45

The SmarPod is a parallel kinematic for precise applications.

Six degrees of freedom
Virtual pivot defined via software
Compact design
Large travel ranges
High resolution
customisable

High repeatability
High stiffness
Many options available:
HV & UHV compatibility
Non-magnetic materials
UV-resilient materials

View the video at SmarPod_110_45.wmv.

Repeatability with Full Travel Range

Repeatability (X, Y, Z) 200 nm
Repeatability (ΘX, ΘY,ΘZ) 10 µrad

The repeatability is even better for smaller movements as shown in the graphs below.

Repeatability for Shorter Travel

Linear Repeatability

Interferometer test
10 steps - back and forth
Step width: 10 nm
One step every 200 ms
Graph shows an excellent linear repeatability

Angular Repeatability

Interferometer test
10 steps - back and forth
Step width: 1 µrad
One step every 500 ms
Graph shows an excellent
angular repeatability

Dimensions

All axes are shown at zero position.

Linear dimensions are given in m

Movement

Travel range*:

X, Y:

Θ_X, Θ_Y:

20 mm

20°

Θ_Z:

10 mm

35°

Max. velocity:

X, Y:

Θ_X, Θ_Y:

10 mm/s

10°/s

Θ_Z:

5 mm/s

10 °/s

Smallest increment:

X, Y:

Θ_X, Θ_Y:

1 nm

1 µrad

Θ_Z:

1 nm

1 µrad

* Measured while all other axes are at their zero position.

Mechanical Properties

Stiffness (X, Y): 1 N/µm
Stiffness (Z): 3 N/µm
Load (Z): 0.5 kg
Aperture: 25.4 mm
Weight: 400 g

Customization

Please do not hesitate to ask for customization so that it fits to your demands as good as possible.

Following three customized SmarPods are shown:

SmarPod with a customized base plate and a customized top plate with an opening

Non magnetic SmarPod based on ceramic guide ways

Black version of a SmarPod for an optical application