Vacuum Compatibility

General

SmarAct positioners are designed for normal atmosphere pressure. However, most positioners can be prepared to work in high-vacuum (HV) or ultra-high vacuum (UHV).

For ordering a vacuum compatible positioner please add "-HV", "-UHV" or "-UHV-T" to the order code of the positioner, e.g. "SLC-1730-HV" or "SLC-1730-UHVT". Please see next pages for explanations.

positioners prepared for UHV operation

• Option: standard for atmospheric pressure
  • Teflon insulated wire
  • Micro- and nanosensors
    
    
• Option: HV for pressures down to 10^-6mbar
  • Teflon insulated stranded wires with braid
  • Vacuum compatible grease
  • Nanosensors
    
    
• Option: UHV for pressures down to 10^-9mbar
  • Kapton insulated stranded wires
  • Nanosensors
  • Back-out temperature 150°C
    
    
• Option: UHV-T for pressures down to 10-9 mbar
  • Teflon insulated stranded wires with braid
  • Otherwise like the option UHV

Feed-through

The number of feedthroughs for a positioning system depend on the vacuum level, on the number of positioners and on the available flange. For each open-loop positioner we need two pins and for each positioner with integrated nano sensor we need at least 10 pins. We recommend to use 12 pins.

• LEMO Feedthrough for HV option
  • O-ring tightened by a screw nut
  • Flanges available on request
  • Electronics in- or outside of the vacuum chamber (recommend: outside)

vacuum feedthrough with sensor module directly mounted onto the according con- nectors (HV option)

• UHVT and UHV Feedthroughs
  • Standard 10 pins for each positioner  or D-SUB15
  • Feedthrough welded into a flange
  • DN16CF and DN40CF flange, other  size on request 
  • Electronics outside the vacuum chamber

		DN40CF flange with a D-SUB15 feedthrough
DN40CF flange with three multipin feedthroughs and Kapton insulated wires

We deliver complete systems containing the feedthroughs plugs and complete cabling. Different flange sizes and feedthroughs are available on request.